Hexafluorobenzene
Catalog Number: | FS-0001 |
CAS Number: | 392-56-3 |
Molecular Weight: | 186.06 g/mol |
Basic Information
Chemical Formula | C6F6 |
MDL | MFCD00000288 |
Packages | 5 g, 10 g, 20 g, 50 g |
Purity | >99% |
Color | Colorless |
Form | Liquid |
Boiling Point | 81°C |
Melting Point | 5°C |
Refractive Index | n20/D 1.38 |
Confirm to Structure | NMR, GC, HPLC, IR |
Application | This product can be used in research and development of semiconductor materials as an etching gas and cleaning agent to improve the performance and reliability of semiconductor devices. |
GHS Hazard Statements | H315-H319 |
Flash Point | 10°C |
Personal Protective Equipment | Gloves, safety glasses and masks. |
Storage
Storage | Store at room temperature, keep dry and cool. |
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